EE 5621 (3 Credits)
Introduction To
Microelectronics Technology
Fall Semester 2021 Syllabus
Last Update:
28 August 2021
Stanley G. Burns
MWAH 252
726-7506
Modality: EE 5621 Lecture will be taught on-line using
ZOOM at the regularly scheduled class times. “Remote”
Modality. You must have the capability to use ZOOM which implies
reasonable broadband service. You also must have the
capability to scan or image your quizzes and homework for submission as e-mail
attachments or submission
in CANVAS.
Class Times: 10:00-10:50 pm Monday, Wednesday, and Friday Using
ZOOM
Location: On-Line Using ZOOM, Synchronous Remote
Modality, for Class Lectures
Office Hours: I encourage you to communicate with me via e-mail or set up
a ZOOM meeting if you have any questions or need additional guidance on the
classwork or any other topic. As much as I would like to meet you in
person, I will be working remotely from home this Fall Semester due to personal medical issues.
I also provide
important schedule information updates via the Class E-Mail
alias. Please call my cell at 218-343-4412 or e-mail
at sburns@d.umn.edu if you want
to set up an appointment using ZOOM.
WEB
Page And E-Mail:
http://www.d.umn.edu/~sburns/ (For
Me and Follow the Links to EE5621)
ABET
Student Learning Outcomes:
1. an
ability to identify, formulate, and solve complex engineering problems by
applying principles of engineering, science,
and mathematics
2. an ability
to apply engineering design to produce
solutions that meet specified needs with consideration of public health,
safety, and welfare, as well as global, cultural, social, environmental, and economic factors
7.
an ability to acquire and apply new knowledge as needed, using appropriate learning
strategies.
Textbook: “Fabrication Engineering at the Micro- and Nanoscale”, 4th Edition, by Stephan A. Campbell, Oxford University Press, 2013
Ø I will also distribute supplementary information
throughout the semester and/or course material will be on the EE 5621 Class Web
page; copied also to CANVAS. I send
e-mails when new material has been posted.
Ø To facilitate class discussions and to
minimize transcription errors, I will distribute copies in CANVAS and on the EE
5621 WEB page. of my Powerpoints that I will use in almost every class period.
COURSE GRADING (Subject to Adjustment)
Periodic
Quizzes
50% (Approximately five or six during the semester).
Homework and Technology Research Paper 25%
Final Examination 25%
TOTAL 100%
Ø I strongly encourage working together in
study groups as you do the problems. This study group paradigm is one approach in implementing Cooperative Learning and Active
Learning paradigms. More on this as we proceed through the semester.
Ø There will be series of 30 minute quizzes
every couple of weeks; the first quiz is scheduled for XX September. Quiz coverage will include material
supporting the problem set, as well as material covered in class through the
previous class period. Any additions or deletions from quiz topical coverage
will be announced in class, via e-mail, and/or on the EE 5621 WEB page and in
CANVAS. I intend to drop the lowest quiz score. ALL QUIZZES ARE OPEN BOOK and WEB, LAPTOP,
AND NOTES. Be careful when using the WEB
because time is obviously limited during the quiz time allocation.
Ø Unless otherwise announced, I will collect the problem set. It is also important to
note that I often use homework problems and topics as part of the bi-weekly
quizzes. I will grade some or all of the problems on each problem set. I
encourage you to ask questions about the homework problems during class and in
office visits. I can try and respond to
e-mail inquires but it is sometimes difficult to discuss problem approaches and
solutions using e-mail. I also encourage
you to ask for assistance on any underlying and supporting topics from other
courses. You may work together, and I encourage you to do so, but remember you,
and you alone, are responsible for your work and you must turn in homework
individually unless otherwise noted.
Ø As a matter of professionalism and
courteousness to your colleagues; use of “Smart Phones”, IR links, iPods, cellular phones, and pagers
in class is prohibited. Please turn off the “ringers/ring tones” before you come to class.
Ø Laptops and Tablets are OK to follow along
with the presentations which will often be posted. However, as a matter of professionalism and
courteousness to your colleagues; use of laptops, PDAs, etc during class for non-class use such as e-mail,
texting, tweeting, IM, Facebook, and
“surfing the WEB” is prohibited.
Ø OK with me to photograph or or self-transcribe any material.
Ø Individuals who have any disability, either
permanent or temporary, which might affect their ability to perform in class,
are encouraged to inform the instructor at the beginning of the semester.
Adaptation of methods, materials, or testing may be made as required to provide
for equitable participation.
Ø Students are expected to conducts themselves in a manner that is respectful of both the instructor and other students.
Furthermore, sexual harassment of any form will not be tolerated.
TENTATIVE SYLLABUS
|
Week |
Text Material |
TOPICS |
|
30 August-3 September |
Course Overview Prologue Chapter 1 |
Course
Introduction Historical
Perspective Basic device
processing sequence |
|
6-10 September No class on Monday) |
Chapter 2
–Semiconductor Substrates |
Start overview
of semiconductor materials , types of solids, and
crystals. We will start by reviewing
basic definitions and semiconductor physics at the EE 2212 level |
|
13-17 September |
Chapter 3
Diffusion |
Chapter 3
Diffusion equation |
|
20-24 September |
Continue in
Chapter 2 Diffusion Start Chapter
3 |
Fick’s first and second order DFQ and
solutions |
|
27 September- 1 October |
Chapter 3 |
Diffusion-Theory
and Practice |
|
4-8 October |
Chapter 4 |
Thermal
Oxidation-Theory and Practice |
|
11-15 October |
Chapter 4 Start Chapter
5 |
Thermal
Oxidation-Theory and Practice Ion
Implantation-Linear Accelerator Type “Tool” |
|
18-22 October |
Continue Chapter
5 Start Chapter 6 |
Ion Implanters “Optical “ Lithography |
|
25-29 October (No class
on Friday-Fall Recess) |
Continue With Chapter 5 and Include Selected Topics in Chapter 9 |
“Optical “ Lithography expanded to Include Very Short Wavelength Techniques |
|
1-5 November |
Selected
Topics in Chapters 12 and 13 |
Evaporation,
Sputtering, and CVD and PECVD |
|
8-12 November |
Selected
Device Topologies From Chapters 16, 17, and 18 |
MOS, BJT,
Optoelectronic Devices |
|
15-19 November |
Selected
Device Topologies From Chapters 16, 17, and 18 |
MOS, BJT,
Optoelectronic Devices |
|
22-26 November (No class
on Friday-Thanksgiving Recess) |
Your Research
Paper Presentation (There are up
to 15 students in the class) 4 Presentations on Monday and Wednesday |
TBD |
|
29 November- 3 December |
Your Research
Paper Presentations Six presentations
on Monday, Wednesday, and Friday |
TBD |
|
6-10 December |
Your Research
Paper Presentations (Remaining presentations)
Course Review:
Friday |
TBD |
|
13-17 December TBD |
FINAL EXAM |
Coverage and Format to be announced |
|
|
|
|